BIMORPH MEMS MEMS microactuator based on silicon diaphragm with piezoceramic (PZT) Material properties via BIMORPH.MAT piezo-electric BIMORPH microactuator Further information https://tfconsult.com/tag/piezo/ https://tfconsult.com/tag/multiphysics/ https://tfconsult.com/piezoelectric-micro-actuators/