Steps to reproduce

Steps:

1. Open this link to live example: (required) https://codesandbox.io/s/09zo1k?file=/demo.tsx
2. Select first 3 rows
3. Deselect all checkboxes using checkbox in the table header (master checkbox)
4. Shift + click row 6

Current behavior

Rows 3-6 get selected

Expected behavior

Only row 6 should be selected

Context

No response

Your environment

  Don't forget to mention which browser you used.
  Output from `npx @mui/envinfo` goes here.

Search keywords: datagrid checkbox shift click

Order ID: 95972